JPS6311719Y2 - - Google Patents

Info

Publication number
JPS6311719Y2
JPS6311719Y2 JP3293781U JP3293781U JPS6311719Y2 JP S6311719 Y2 JPS6311719 Y2 JP S6311719Y2 JP 3293781 U JP3293781 U JP 3293781U JP 3293781 U JP3293781 U JP 3293781U JP S6311719 Y2 JPS6311719 Y2 JP S6311719Y2
Authority
JP
Japan
Prior art keywords
door
head
arm
opening
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3293781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57146330U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3293781U priority Critical patent/JPS6311719Y2/ja
Publication of JPS57146330U publication Critical patent/JPS57146330U/ja
Application granted granted Critical
Publication of JPS6311719Y2 publication Critical patent/JPS6311719Y2/ja
Expired legal-status Critical Current

Links

JP3293781U 1981-03-09 1981-03-09 Expired JPS6311719Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3293781U JPS6311719Y2 (en]) 1981-03-09 1981-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3293781U JPS6311719Y2 (en]) 1981-03-09 1981-03-09

Publications (2)

Publication Number Publication Date
JPS57146330U JPS57146330U (en]) 1982-09-14
JPS6311719Y2 true JPS6311719Y2 (en]) 1988-04-05

Family

ID=29830316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3293781U Expired JPS6311719Y2 (en]) 1981-03-09 1981-03-09

Country Status (1)

Country Link
JP (1) JPS6311719Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587820A (ja) * 1981-07-07 1983-01-17 Toshiba Corp 拡散炉におけるチユ−ブ入口開閉装置
JPH0630342B2 (ja) * 1984-12-25 1994-04-20 富士通株式会社 縦型炉

Also Published As

Publication number Publication date
JPS57146330U (en]) 1982-09-14

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